Millimeter and Submillimeter-Wave Reflectionless Filters and Diplexers Based on Silicon Micromachining

Sauber, Noah, Electrical Engineering - School of Engineering and Applied Science, University of Virginia
Sauber, Noah, Engineering Graduate, University of Virginia

Rectangular waveguide is the dominant medium for guided-wave electromagnetic propagation at frequencies greater than 100 GHz and is used up to several terahertz. While rectangular waveguide is low-loss and widely employed for millimeter and submillimeter-wave instruments and test equipment, it is inherently banded-limited by a minimum frequency (the cut-off frequency) and a maximum frequency (due to the requirement for single-mode propagation). Transmission lines, which support TEM modes, offer broadband operation but with a significant increase in loss. Dielectric guide is not as commonly used in the millimeter and submillimeter-wave range because it does not pass DC and the associated difficulties of interfacing it with electronic components and circuitry.

Methods for multiplexing more than one frequency band onto a common TEM medium has potential to address bandwidth limitations exhibited by waveguide-based systems. This issue is of particular interest in instrumentation for metrology, where characterizing such systems require performing measurements over multiple bands, necessitating reconfiguration and recalibration of the measurement system — an inconvenient and time-consuming process that can introduce step-changes in measurements between bands due to dimensional differences or imperfections in the different media.

Multiplexers that can combine two-or-more bands onto a single broadband transmission medium (transmission line) provide an important vehicle for addressing the bandwidth limitations of current millimeter and submillimeter-wave measurement tools. The aim of this dissertation research is to investigate and demonstrate a practical implementation and process for realizing reflectionless filters and multiplexers for the millimeter and submillimeter-wave region of the spectrum using silicon-on-insulator (SOI) as a platform for integration.

PHD (Doctor of Philosophy)
Reflectionless, Quasi-reflectionless, Filter, Diplexer, Multiplexer, High-frequency, Submillimeter-wave, Millimeter-wave, Broadband, Silicon-on-insulator, SOI, Suspended, Transmission Lines, Inductors, Micromachined

In partial fulfillment of doctoral dissertation requirements.
Successfully defended July 2023.
Noah Sauber, Copywrite 2023. All rights reserved.

All rights reserved (no additional license for public reuse)
Issued Date: