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Micromachined On-Water Probes for Characterization of Terahertz Devices and Circuits771 views
Author
Bauwens, Matthew, Electrical Engineering - School of Engineering and Applied Science, University of Virginia
Advisors
Weikle, Robert, Department of Electrical and Computer Engineering, University of Virginia
Abstract
The terahertz frequency spectrum (300 GHz - 3 THz) is recognized as a potential tool for many applications, and the development of terahertz integrated circuits promises to unlock this potential. However, the on-wafer measurement infrastructure necessary to accurately characterize integrated circuits and devices in the terahertz regime is largely undeveloped. In addressing this need, the recent development of the micromachined on-wafer probe represented a turning point, establishing a foundation for terahertz on-wafer measurement infrastructure.
In this work, improvements to the micromachined probe design are developed to provide more robust and reliable electrical and mechanical performance. Additionally, the design of a new micromachined probe housing enables increased overall performance of the on-wafer measurement system.
To address emerging measurement needs in the terahertz range, the second part of this work presents the design and characterization of micromachined on-wafer probes for the WR-1.2 (600 - 900 GHz) and WR-1.0 (750 GHz - 1.1 THz) waveguide bands. These designs enable on-wafer measurement capabilities of devices and circuits to 1.1 THz for the first time.
Degree
PHD (Doctor of Philosophy)
Rights
All rights reserved (no additional license for public reuse)
Bauwens, Matthew. Micromachined On-Water Probes for Characterization of Terahertz Devices and Circuits. University of Virginia, Electrical Engineering - School of Engineering and Applied Science, PHD (Doctor of Philosophy), 2014-07-31, https://doi.org/10.18130/V3WJ99.